摘要
振动对仪器和机床的精度都有较大影响,对其进行准确检测和分析,是实现振动有效控制的前提。本研究提出了一种高灵敏度和低耦合三维弹性机构及其参数优化方法。介绍了三维弹性机构的构型,并通过理论建模、参数优化和仿真分析完成了三维弹性机构的设计和优化,最后将该弹性机构与高灵敏度、低耦合传感系统相结合,研制了高性能三维低频加速度计系统,并实测了加速度计系统的性能参数。根据实验结果,使用该弹性机构的三维加速度计的灵敏度优于2.0 V/(m·s^(-2)),耦合误差低于1.5%,以及频率响应范围为1~13 Hz,符合设计要求。因此,本研究所提出的三维弹性机构具有三维等灵敏度和低耦合的特点,可以广泛应用于各种三维加速度计。
Vibration has a great impact on the accuracy of both instruments and machine tools,and its accurate detection and analysis is a prerequisite for effective vibration control.In this study,a high sensitivity and low coupling 3D elastic mechanism,and its parameter optimization method are proposed.The configuration of the 3D elastic mechanism is introduced,and the design of the 3D elastic mechanism is completed through theoretical modeling,parameter optimization,and simulation analysis.Finally,the elastic mechanism is combined with a high-sensitivity and low-coupling sensing system to develop a 3D low-frequency accelerometer system with high performance,and the performance of the accelerometer are tested through experiments.According to the experimental results,the sensitivity of the 3D accelerometer using this elastic mechanism is better than 2.0 V/(m·s^(-2)),the coupling error is lower than 1.5%,as well as the frequency response range is 1~13 Hz,which is in accordance with the design requirements.Therefore,the 3D elastic mechanism proposed in this study is characterized by 3D equal sensitivity and low coupling,and can be widely used in various 3D accelerometers.
作者
雷英俊
许桢英
李瑞君
Lei Yingjun;Xu Zhenying;Li Ruijun(School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China;School of Instrument Science and Opto-electronic Engineering,Hefei University of Technology,Hefei 230009,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2023年第11期47-55,共9页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金(52175506)项目资助
关键词
三维加速度计
弹性机构
参数优化
等灵敏度
低耦合
3D accelerometer
elastic mechanism
parameter optimization
iso-sensitive
low coupling
