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单晶硅球折算质量的精密测量研究

Study on precision measurement of conversion quality of monocrystalline silicon ball
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摘要 随着质量计量单位的量子化变革,研究将单晶硅球作为质量计量标准的替代实物量具的可能性,对单晶硅球折算质量进行精密测量。采用传递比较法,将2kg和500g砝码进行组合,对单晶硅球进行量传。单晶硅球的折算质量为2.5143847kg,测量精度达到0.1mg,测量结果的扩展不确定度U=3.4mg(k=2),相对扩展不确定度为1.4×10^(-6),单晶硅球的空气浮力修正值为926.3mg,其测量结果不确定度接近F等级砝码,该单晶硅球密度约为2.30g/cm^(3)。由于单晶硅球与目前铂铱合金的国际实物基准以及不锈钢材质的国内砝码标准之间存在较大的密度差,在质量量值传递过程中会引起较大的空气浮力误差,这对统一我国不同海拔地区的质量量值十分不利,因此不宜将单晶硅球作为质量量值的替代实物量具。考虑到单晶硅球特殊的晶体结构和稳定的物理化学特性,将其作为体积标准进行研究是一个可靠的方向。 With the quantization change of quality measurement unit,to study the possibility of using monocrystalline silicon ball as a substitute for physical measurement standard,and to accurately measure the converted quality of monocrystalline silicon ball.Using the transfer comparison method,2kg and 500g weights were combined to transfer the monocrystalline silicon ball.The converted mass of monocrystalline silicon ball is 2.5143847kg,the measurement accuracy is 0.1mg,the expanded uncertainty of measurement result is U=3.4mg(k=2),and the relative expanded uncertainty is 1.4×10^(-6),the air buoyancy correction value of the monocrystalline silicon ball is 926.3mg,the uncertainty of the measurement result is close to the F1 weight,and the density of the monocrystalline silicon ball is about 2.30g/cm^(3).Due to the large density difference between the monocrystalline silicon ball and the current international physical standard of platinum iridium alloy and the domestic weight standard of stainless steel,it will cause large air buoyancy error in the process of mass value transmission,which is very unfavorable to unifying the mass values of different altitudes in China.Therefore,monocrystalline silicon ball should not be used as an alternative physical measuring tool for mass values.Considering the special crystal structure and stable physicochemical properties of monocrystalline silicon sphere,it is a reliable direction to study it as a volume standard.
作者 陈露 解金芳 陈俊 王昱 CHEN Lu;XIE Jingfang;CHEN Jun;WANG Yu(Hubei Institute of Metrology and Measurement Technology,Wuhan 430223,China;Central South China National Metrology and Testing Center,Wuhan 430071,China)
出处 《中国测试》 CAS 北大核心 2022年第S01期143-148,共6页 China Measurement & Test
基金 湖北省市场监督管理局科技计划项目(Hbscjg-JS202004)
关键词 单晶硅球 实物量具 折算质量 测量 体积标准 monocrystalline silicon ball physical measuring tools conversion quality measurement volume standard
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