摘要
搭建了一套完整的基于白光LED和光纤耦合器式的光谱共焦位移测量系统。首先对色散物镜、光纤耦合器和光谱仪中各参数对系统性能造成的影响进行了分析,并通过ZEMAX光学仿真软件确定了较优的色散物镜和光谱仪的分光系统结构;然后对影响谱峰定位精度的因素进行了分析,通过处理算法比较确定了较优的谱峰定位方法;最后通过双频激光干涉仪对设计的系统进行标定和测量,实验结果表明系统在435 nm~655 nm波段,测量位移为1.9 mm,平均测量精度1.6μm。
A complete set of spectral confocal displacement measurement system based on white LED and fiber coupler was built.Firstly,the influence of the parameters of dispersive objective lens,fiber coupler and spectrometer on the system performance is analyzed.And the optical simulation software determines the better structure of dispersive objective lens and spectrometer.Then analyzes the factors affecting the spectral peak positioning accuracy,and determines the better spectral peak positioning method through the comparison of processing algorithms.Finally,the system is calibrated and measured by dual frequency laser interferometer.The experimental results show that the system is 435 nm-655 nm band,the measurement range is 1.7 mm,and the average measurement accuracy is 1.8μm.
作者
齐琳
徐晓冰
QI Lin;XU Xiaobing(Department of Electrical and Electronic Engineering,Hebei Petroleum Technical University,Chengde Hebei 067000,China;School of Electrical Engineering and Automation,Hefei University of Technology,Hefei Anhui 230009,China)
出处
《电子器件》
CAS
北大核心
2022年第2期439-444,共6页
Chinese Journal of Electron Devices
基金
2015年武汉千里马电源机械制造有限公司“SLQ系列锂电池全自动分切机的加工制造”项目(2015HK038)
关键词
位移传感器
光谱共焦
色散物镜
光纤耦合器
displacement sensor
spectral confocal
dispersive lens
fiber coupler
