摘要
移动通信网络的发展使得声表面波(Surface Acoustic Wave,SAW)滤波需要更高的频率和更大的带宽。更高的频率使得传统瑞利波(Rayleigh SAW,RSAW)器件需要更小尺寸,带来制造技术的难题。因此,采用更高波速的纵漏表面波(Longitudinal Leaky SAW,LLSAW)进行高频SAW滤波器的设计。实验表明,相同条件下,LLSAW模式获得达RSAW模式1.8倍的频率,同时也有更高的带宽。还研究了改变质量负载的电极金属化率与厚度对器件工作频率和带宽的影响,结果表明电极金属化率和厚度的增加会降低中心频率,但金属化率过小也会使中心频率下降。同时带宽会受金属化率的影响,而几乎不随电极厚度变化。
The development of mobile communication network makes Surface Acoustic Wave(SAW)filter need higher frequency and larger bandwidth,and the higher frequency makes the traditional Rayleigh SAW device need smaller size,which brings difficulties in manufacturing technology.Therefore,the Longitudinal Leaky SAW(LLSAW)with higher wave speed is adopted to design the highfrequency SAW filter.The experiment shows that under the same conditions,the LLSAW mode can achieve 1.8 times the center frequency of the RSAW mode,and also has higher bandwidth.The influence of the electrode metallization rate and thickness of the mass load on the operating frequency and bandwidth of the device is also studied.It is shown that the increase of electrode metallization rate and thickness will reduce the central frequency,but too small metallization rate will also reduce the central frequency.Meanwhile,the bandwidth will be affected by the metallization rate,but hardly with the electrode thickness.
作者
张淑娥
邸继伟
ZHANG Shu’e;DI Jiwei(Department of Electronic and Communication Engineering,North China Electric Power University,Baoding 071003,China;Hebei Power Internet of Things Technology Key Laboratory,North China Electric Power University,Baoding 071003,China;Baoding Key Laboratory of Optical Fiber Sensing and Optical Communication Technology,North China Electric Power University,Baoding 071003,China)
出处
《电声技术》
2022年第12期122-126,共5页
Audio Engineering
关键词
纵漏表面波(LLSAW)
声表面波谐振器
金属化率
电极厚度
质量负载
Longitudinal Leaky Surface Acoustic Wave(LLSAW)
surface acoustic wave resonator
metallization rate
electrode thickness
mass load
