摘要
电感位移传感器常用于高速高精光束定位装置等精密测量领域,为了提高电感位移传感器的性能,需要研究电感传感器灵敏度、线性度、分辨率、带宽的影响因素。针对不同电导率大小的衔铁对电感灵敏度的影响关系问题,建立了涡流效应的变压器模型,结果表明:电导率越高的衔铁,其灵敏度越小。分析了激磁频率的选取原则,并推导了电感、电阻的分开测量计算方法。为了确定基于数字锁相放大器解调的位移分辨率与带宽的关系,建立了基于数字锁相放大器解调的测量误差模型。设计了差动电感传感器的位移检测系统,实验结果表明:在带宽为1kHz、总量程为1mm时,经过三次正反行程循环测量,灵敏度为6.888V/mm,重复性达到0.275%,位移分辨率达到26.40nm。经过三次样条平滑非线性补偿后,线性度可以达到99.93%。在相同量程与带宽内,分辨率、线性度优于部分国内外性能较好的传感器。
Inductive displacement sensors are commonly used in precision measurement fields such as high-speed and high-precision beam positioning devices.In order to improve the performance of inductive displacement sensors,it is necessary to study the factors that affect the sensitivity,linearity,resolution and bandwidth of inductive sensors.A transformer model based on eddy current effect is established to investigate the relationship between the sensitivity of inductors with different conductivities.The results show that the higher conductivity of the armature,the lower its sensitivity.The selection principle of excitation frequency is analyzed,and the calculation method for separate measurement of inductance and resistance is derived.In order to determine the relationship between displacement resolution and bandwidth based on digital phase-locked amplifier demodulation,a measurement error model based on digital phase-locked amplifier demodulation is established.A displacement detection system using a differential inductive sensor has been designed.According to the experiment results,the sensitivity is 6.888V/mm after three cycles of forward and reverse travel measurements at a bandwidth of 1kHz and a total range of 1mm.The repeatability reaches 0.275%,and the displacement resolution reaches 26.40nm.After cubic spline smoothing and nonlinear compensation,the linearity can reach 99.93%.Within the same range and bandwidth,the resolution and linearity are superior to some sensors with better performance both domestically and internationally.
作者
贺志安
范世珣
邢立华
陈宁
HE Zhi-an;FAN Shi-xun;XING Li-hua;CHEN Ning(National University of Defense Technology,Changsha 410073;Beijing Institute of Aerospace Control Devices,Beijing 100039;Beijing Aerospace Microelectromechanical Technology Research Institute,Beijing 100094)
出处
《导航与控制》
2023年第5期86-95,11,共11页
Navigation and Control
基金
国家自然科学基金(编号:52075536)
关键词
变压器模型
涡流效应
分辨率
线性度
transformer model
eddy current effect
resolution
linearity
