摘要
针对现有的各种CrN系硬质膜的制备技术、晶体结构、硬度、耐磨性、耐蚀性等组织性能方面进行了详细的讨论和分析,指出了不同CrN系薄膜的性能及优缺点,并对未来CrN系硬质膜的发展进行了展望。
In this work,the preparation technologies,crystal structure,hardness,wear resistance and corrosion resistance of the various present CrN-based hard films were discussed and analyzed in detail,and the advantages and limitations of the different CrN-based hard films were pointed out.Moreover,the future development of the CrN-based hard films was prospected.
作者
董文杰
张钧
孙宇菲
彭立静
DONG Wen-jie;ZHANG Jun;SUN Yu-fei;PENG Li-jing(College of Mechanical Engineering,Shenyang University,Shenyang 110044,China)
出处
《材料保护》
CAS
CSCD
北大核心
2019年第12期129-134,共6页
Materials Protection
基金
辽宁省自然科学基金项目(2015020216)资助.
关键词
CrN系硬质薄膜
硬度
耐磨性
抗氧化性
耐腐蚀性
CrN-based hard films
hardness
wear resistance
oxidation resistance
corrosion resistance
