摘要
采用溶胶-凝胶旋涂法(Sol-Gel Spin-Coating Method)制备了Al掺杂量为3.00at%,N掺杂量分别为6.00at%,7.00at%,8.00at%和9.00at%的Al/N共掺杂TiO_(2)薄膜样品。对样品测试的结果表明,共掺杂样品依旧保留了TiO_(2)的基本结构,并且Al/N共掺杂样品的晶粒尺寸有不同程度的减小,使样品表面得以修饰,变得更加均匀、平整。共掺杂样品吸收边都出现了不同程度的红移,在紫外光区以及可见光区的吸光性都有所增强。N掺杂量为7.00at%时,(101)衍射峰值最大,峰型最尖锐,所得到的TiO_(2)薄膜的光学性能最好。共掺杂后的样品与本征TiO_(2)相比带隙值都有所减小,且最小值为2.873 eV。以上结果表明Al/N共掺杂TiO_(2)薄膜使其光学性能得到了改善。
In this study,based on the sol-gel spin coating method,aluminum and nitrogen co-doped TiO_(2)film samples were prepared with aluminum doping amount of 3.00at%,and nitrogen doping amount of 6.00at%,7.00at%,8.00at%,and 9.00at%,respectively.The test results of the samples show that the basic structure of TiO_(2)is still retained in the co-doped samples,and the grain size of aluminum and nitrogen co-doped samples is reduced to different degrees,which makes the surface of the samples modified to become more uniform and flat compared with that of the undoped.The co-doped samples showed different degrees of red shift and enhanced absorbance in both UV and visible regions.When the doping amount of nitrogen is 7.00at%,the diffraction peak of(101)is the largest,the peak type is the sharpiest,and the obtained TiO_(2)film has the best optical performance.Compared with the eigenstate TiO_(2),the band gap values of the co-doped samples are decreased,and the minimum value is 2.873eV.The above results indicate that Al/N co-doped TiO_(2)film can improve its optical properties.
作者
王泽文
赵莉
蔺冬雪
王玉新
WANG Zewen;ZHAO Li;LIN Dongxue;WANG Yuxin(School of Physics and Electronic Technology,Liaoning Normal University,Dalian 116029,CHN)
出处
《半导体光电》
CAS
北大核心
2023年第1期87-91,共5页
Semiconductor Optoelectronics
基金
辽宁省教育厅面上项目(LJKMZ20221429)
