摘要
六角钡铁氧体材料(BaFe12O19,BaM)被认为是最具应用潜力的下一代自偏置毫米波铁氧体材料。在本研究中采用脉冲激光沉积(PLD)技术制备了厚度在200nm的钡铁氧体薄膜,其具有高的剩磁比和较低的铁磁共振线宽。在沉积过程中,氧气压强大小是十分关键的工艺参数。沉积得到的BaM薄膜具有高纯的相成分和高度的c轴取向;当氧气压为180mTorr时,薄膜表面粗糙度要优于氧压为90mTorr时的BaM表面粗糙度;磁滞回线测试测得薄膜呈现面外取向,具有较大的磁各向异性,矩形比为0.95,饱和磁化强度4πMs为3900 Oe。当沉积的氧气压降低,BaM薄膜易轴的矫顽力从3000 Oe增大到5000 Oe,回线的矩形度也略有降低。同时易轴的饱和场从5000 Oe增大到15000 Oe,表明氧气压的降低导致薄膜的磁各向异性大大降低;铁磁共振线宽测试得到在180mTorr氧气压下沉积得到的200nm的BaM薄膜的铁磁共振线宽为140 Oe(@10GHz)。
The hexagonal barium ferrite(BaFe12O19,BAM)is considered to be the next generation selfbiased millimeter wave ferrite with the most potential application.In this study,barium ferrite films with thickness of 200nm were prepared by pulse laser deposition(PLD),which have high remanence ratio and low ferromagnetic resonance linewidth.In the process of deposition,the oxygen pressure is the key parameter.The deposited BaM films have high purity phase composition and high c-axis orientation;when the oxygen pressure is 180mtorr,the surface roughness of the films is better than that of the BaM films when the oxygen pressure is 90mtorr;the hysteresis loop test shows that the films have an out of plane orientation,with a large magnetic anisotropy,the rectangular ratio is 0.95,and the saturation magnetization is 4πMS is 3900 Oe.When the pressure of oxygen decreases,the coercivity of BaM film increases from 3000 Oe to 5000 Oe,and the rectangularity of the loop decreases slightly.At the same time,the saturation field of easy axis increases from 5000 Oe to 15000 Oe,which indicates that the decrease of oxygen pressure leads to the decrease of magnetic anisotropy of the film;the ferromagnetic resonance linewidth of BaM film deposited at 180mtorr oxygen pressure is 140 Oe(@10GHz).
作者
林亚宁
周俊
张纬统
李林玲
徐德超
倪经
张明
LIN Yaning;ZHOU Jun;ZHANG Weitong;LI Linling;XU Dechao;NI Jing;ZHANG Ming(The Ninth Institute of China Electronics Technology Group Corporation,Mianyang 621000,China;Southwest University of Science and Technology,Mianyang 621000,China)
出处
《功能材料与器件学报》
CAS
2020年第2期103-107,共5页
Journal of Functional Materials and Devices
关键词
六角钡铁氧体
脉冲激光沉积
氧气压强
铁磁共振线宽
M-type hexagonal barium ferrite film
pulsed laser deposition
oxygen pressure
ferromagnetic resonance linewidth
