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透明导电薄膜ZnO∶Al的组织结构分析

Analysis on the Microstructure of Transparent Conductive Oxide ZnO:Al Thin Films
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摘要 Zno∶Al(ZAO)透明导电薄膜具有高的载离子浓度和大的光学禁带宽度,因而具有优异的电学和光学性能,极具应用价值.本文研究了ZAO薄膜的微观组织结构、化学成分、及其应用前景. Transparent conductive ZnO∶Al(ZAO) thin films are semi-conductor oxides with both high carrier concentration and large optical band gap.ZAO films have outstooding electrical and optical properties,and are emerging as a most potential alternative candidate for transparent conducting material.The preparation status of ZAO films is introduced.The micro-structure and their applicating prospect and the proposal for the future research are described.
作者 殷胜东 马勇 王楠
机构地区 重庆师范大学物理学与信息技术学院
出处 《山西师范大学学报（自然科学版）》 2006年第2期32-36,共5页 Journal of Shanxi Normal University(Natural Science Edition)
基金 重庆市教委资助项目(040810)
关键词 ZAO薄膜 形态结构 化学成份 应用前景 ZAO preparation status micro-structure research proposal
分类号 TB383 [一般工业技术—材料科学与工程]
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参考文献26

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二级参考文献15

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共引文献40

山西师范大学学报（自然科学版）
2006年 第2期

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