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基于微型悬臂梁的发电机制探索 被引量：5

Study on Electricity Generating Mechamism of Micro Cantilever
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摘要 微机电系统(MEMS)微型化过程中,要求电源装置也必须向微型化发展.在现有微电源研究基础上,结合微型硅悬臂梁的力学分析以及压电晶体材料压电效应特性,提出一种新的压电陶瓷(PZT)微型硅悬臂梁发电装置.借助微型硅悬臂梁质量块的振动和PZT的正压电效应,实现振动机械能向电能转换.该装置结构简单、体积小、质量小,可以用MEMS集成加工工艺实现结构加工,因此与其他微型MEMS器件可以集成在一个基础上.
作者 杜小振 褚金奎 朴相镐 张海军
机构地区 大连理工大学微系统研究中心
出处 《中国机械工程》 EI CAS CSCD 北大核心 2005年第z1期41-43,共3页 China Mechanical Engineering
基金 国家自然科学基金资助项目(50475153) 教育部新世纪优秀人才支持项目
关键词 微型悬臂梁 压电陶瓷 微能源 MEMS
分类号 TK01 [动力工程及工程热物理]
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参考文献5

二级参考文献15

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共引文献36

同被引文献35

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  • 3INGO K,DJORDDJE M,GERALD E,et at A new approach for MEMS power generation based on a piezoelectric di- aphragm [J]. Sensors and Actuators A:Physical,2008,142 (1):299.
  • 4ROUNDY S,WRIGHT P K,RABAEY J.A study of low level vibrations as a power source forwireless sensor nodes [ J ]. Computer Communications, 2003 ( 26 ) : 1131-1144.
  • 5ROUNDY S,WRIGHT P K.A piezoelectric vibration based generatorfor wireless electronics [J ]. Smart Materials and Structures, 2004 ( 13 ) : l 131-1142.
  • 6STEPHEN R P,SHANE F,HANI H. On low-frequency electic powergeneration with PZT ceramics[J]. IEEE/ASME Transactions on Mechatronies,2005,10(2) :240-252.
  • 7张福学 王丽坤.现代压电学[M].北京:科学出版社,2002..
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  • 9Roundy S, Wright P K. A piezoelectric vibration based generator for wireless electronics [ J ]. Smart Materials and Structures, 2004(13) :1131 -1142.
  • 10Stephen R P, Shane F, Hani H. On low-frequency electic power generation with PZT ceramics [ J ]. IEEE/ASME Transactions on Mechatronics,2005,10(2) :240-252.

引证文献5

二级引证文献39

中国机械工程
2005年 第z1期

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