3[4]Pauleau Y. Generation and Evolution of Residual Stresses in Physical Vapour-deposited Thin Films.Vacuum, 2001, 61:175～181
4[5]Wild S, Grieveson P, Jack K. The Crystal Structures of Alpha and Beta Silicon and Germanium Nitrides, Special Ceramics 5. British Ceramic Research Association, 1972
5[7]Wolf S, Tauber R N. Silicon Processing for the VLSI Ers. 2nd Ed. Sunset Beach, CA: Lattcs Press, 1999
