摘要
通过实验分析了肋环夹持松紧度和劈刀存在两个因素对超声键合换能系统电学导纳特性的影响规律。对换能系统在悬挂有无劈刀和夹持8个松紧度等各个情况下进行谐振频率附近的导纳圆测量,确定换能系统等效电路各特征参数的变化情况。由实验结果的分析可知,劈刀的附加质量以及肋环松紧程度对换能系统谐振频率的影响不大,但劈刀的存在改变了换能系统的能量分布和耗散,是影响换能系统各特征参量的主要因素之一。这些结论有助于超声键合换能系统的优化。
Dynamical characteristics of transducer are important for ultrasonic bonding quality.The admittance curves of transducer were studied,by tool on/off test and clamping tightness changing test.The model of equivalent circuit is used for parameter analysis,based on admittance circle of the transducer.The results show that additive mass of bonding tool and clamp tightness may not affect resonance frequency of a PZT transducer so much,but bonding tool is one of main factors affecting performance,because it changes the distribution and dissipation of energy in the PZT transducer.These results will be helpful for optimization of the ultrasonic bonding transducer.
出处
《微细加工技术》
EI
2006年第5期59-64,共6页
Microfabrication Technology
基金
国家自然科学基金资助项目(505752305042950150390064)
973项目资助(2003CB716202)
关键词
超声键合
压电换能系统
等效电路
导纳
ultrasonic bonding
piezoelectric transducer
equivalent circuit
admittance circle
