摘要
以SiN为材料,采用与CMOS工艺相兼容的技术,制备了波导宽度为1μm,半径为400μm的SiN光学微环。经测量,其品质因数(Q值)高达20 000,自由光谱范围(FSR)为0.5 nm。提出了采用光学微环传感器、单波长光源和光功率计对待测物进行测量的方案。实验证明,该方案与传统的采用光谱仪测量谐振峰值漂移的方法相比,可以取得更高的系统探测灵敏度。最后,利用微环传感器对葡萄糖溶液浓度进行测量,灵敏度高达10-4折射率单元(RIU),证明了该传感器可以应用于溶液检测领域。
The microring resonator was fabricated by using CMOS compatible processes with 1 μm wide waveguides and 400 μm in radius,which has a high Q factor up to 20,000 and a Free spectrum range of 0.5 nm.A measurement scheme was proposed by using the resonator,a single-wavelength light source and an optical power meter,which has higher system sensitivity than the conventional measurement setup by detecting resonance wavelength shifts with an optical spectrometer.Finally,the resonator was applied to detect glucose c...
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2009年第9期1133-1136,共4页
Journal of Optoelectronics·Laser
基金
国家“973”预研资助项目(2006CB708310)
国家自然科学基金资助项目(60578048)
关键词
微环传感器
品质因数
测试
microring resonator sensor
Q factor
measurement
