摘要
分别利用电子束蒸发和离子束溅射手段在单晶硅基底上制备了54.7°入射1315nm和632.8nm双波长高反射薄膜,并对两种手段所镀制薄膜地性能进行了比较;然后对离子束溅射所镀制的反射镜进行了胶合,得到了高精度的角立方反射器。最后,将所制备的角立方反射器实际用于化学氧碘激光谐振腔后,获得了近衍射极限的激光输出。
1315nm and 632.8nm dual wavelength HR optical thin films are deposited on single crystal silicon substrate respectively by E-beam evaporation and IBS,and the properties of these two HR films are compared with each other.Then the HR mirrors deposited by IBS are accurately adhered together to get corner cube reflector.At last,the fabricated corner cube reflector is applied in the COIL resonator and the ideal result is achieved.
出处
《光学技术》
CAS
CSCD
北大核心
2006年第z1期648-650,共3页
Optical Technique
