摘要
一种基于拍波干涉原理的无导轨大尺寸测量系统已研制成功。它以双纵模热稳频 He-Ne 激光为光源,其两纵模生成于同一振腔内具有天然同轴的优势,在整个测量范围内不会发生光束分离。两纵模频差约790MHz,拍波波长约380 mm。其稳定度(即拍波波长稳定度)与激光频率稳定度相同,在无空调并有冷热气流吹拂时可保证不低于10^(-7)。两纵模频差以拍波节点为对准标志,采用自适应滤波和小波锐化器有效滤除噪声,从而提高了节点检测的测量精度。测量起点和终点到最近节点的距离由同一光源分出来的双频干涉仪精确测定,分辨力为0.08μm。经实验验证:系统的测量范围大于20 m,测量不确定度优于30μm/10 m。
A large-scale measuring system without guide based on the principle of beatwave interferometry is described.The frequency-stabilized double longitudinal modes He-Ne laser with thermoregulation is used as light source.Its two beams of double longitudinal modes generate in the same resonator of the laser and are naturally coaxial.The frequency difference is about 790 MHz and beat wavelength 380 mm.Its stability is the same as the laser, which is better than 10^(-7) in open air.The node of the beatwave is used as sampling flag.An adaptive filter and a wavelet transform program are used to eliminate the noise and improve the accuracy of node detecting effectively. The distance between the node and the measuring point is measured with double frequency interferometer,which is combined in the same optical system and its resolution is 0.08 μm.The experiments indicate that the measuring range is 20 m and the uncertainty 30 μm/10 m.
出处
《红外与激光工程》
EI
CSCD
北大核心
2006年第z3期60-64,共5页
Infrared and Laser Engineering
基金
国家自然科学基金(5027101)
关键词
大尺寸
拍波
双纵模
节点
不确定度
Large-scale
Beatwave
Double longitudinal modes
Node
Uncertainty
