摘要
利用琼斯矩阵理论推导了光学双平衡式相干接收的原理,得到了具有正交相关性的包含全部光学信息的IQ信号,给出了基于IQ正交信号解调待测光信号信息的信号处理算法.基于该原理设计了一种高速微机电系统扫描式激光外差干涉仪,得到了待测玻璃的厚度信息分布图.该干涉仪的波前相位差提取准确度可高达0.01rad、测量速度可达40frame/s、最大测量直径可达到300mm,在实时光学检测方面有广阔的应用价值.
The principle of optical dual-balanced coherent receive is deduced using Jones matrix,the IQ signal is obtained that contains all the optical information,and the signal processing algorithm based on the IQ signal to demodulate optical signal information is given.Based on this principle,a high-speed MEMS scanning laser heterodyne interferometer is designed,and the thickness map of the test glass is obtained.The interferometer wavefront phase extraction accuracy achieves 0.01 radians,the measurement speed reaches 40 frame/s,and the maximum measured diameter can reach 300 mm,which show the broad application value in real-time optical detection.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2012年第9期1015-1018,共4页
Acta Photonica Sinica
基金
国家自然科学基金(No.61078063)资助
关键词
双平衡式
相干接收
外差
干涉仪
Dual-balanced
Coherent receive
Heterodyne
Interferometer
