摘要
针对B212型YG6硬质合金成形铣刀片,采用热丝化学气相沉积的方法,在其上沉积微米级金刚石薄膜。采用有限元分析的方法,研究成形铣刀片金刚石涂层的制备工艺,对热载荷作用下的金刚石薄膜和硬质合金基体间的热应力进行数值模拟计算,分析主要沉积工艺参数对金刚石涂层热应力的影响;采用扫描电镜、拉曼光谱及压痕实验等表征方法验证刀片不同部位金刚石薄膜的热应力特性。结果表明:较低的生长温度和较大的厚度有利于金刚石薄膜热应力的降低;在现有的制备条件下,保持沉积温度750℃基本恒定,沉积6 h后,薄膜厚度约为10μm,金刚石薄膜热应力较低,沉积质量较好,表现出良好的附着力,附着强度介于600 N和1000 N之间。
On the YG6 carbide form milling cutter blade B212,a micron diamond film is deposited by hot filament chemical vapor deposition. Based on diamond coating preparation process for the form milling cutter blades,thermal stresses under different thermal loads between diamond films and carbide substrate are numerically simulated and calculated by means of the finite element method,and the effect of main process parameters is analyzed on diamond coating thermal stress. Then thermal stress properties of diamond films in different parts of the blade are validated from such characterization methods as scanning electron microscopy, Raman spectroscopy and indentation experiments. Results show that a lower growth temperature and a larger thickness of diamond films contribute to the reduction of thermal stress. Besides,under the existing preparation conditions,maintaining a substantially constant deposition temperature of 750 ℃ and depositing for 6 hours,the diamond film could be deposited to a thickness of about 10 μm with lower thermal stress and better quality,and the films exhibit good adhesion with the adhesive strength of 600 ~ 1 000 N.
出处
《金刚石与磨料磨具工程》
CAS
2013年第5期48-52,56,共6页
Diamond & Abrasives Engineering
基金
河南省教育厅项目(2008B460010)
河南理工大学青年基金重点资助项目(Q2012-34A)
河南理工大学博士基金(B2011-096)
关键词
热丝化学气相沉积
金刚石薄膜
有限元模拟
热应力
hot filament chemical vapor deposition
diamond film
finite element simulation
thermal stress
