摘要
本文主要介绍了纳米三坐标测量机的驱动系统。纳米三坐标测量机是一个十分复杂的系统,包括复杂的机械结构,精密的信号处理系统,灵敏的测头系统,精密的驱动系统以及其他的系统和模块。在本研究系统中,基于DVD读取头的新型的三维测量测头应用于三维测量以及定位。三个压电线性电机作为纳米三坐标测量机的驱动电机。机械机构的运动平台按照特殊的原理设计,可以最大化的消除阿贝误差。长度测量系统采用了激光回馈干涉仪。所提出的驱动与控制策略,可以实现长距离纳米级精度的快速精密驱动以及定位。X、Y、Z三个方向上的行程为50mm×50mm×50mm。目前,本系统可以实现对不定距离的单方向的快速稳定的逼近,并有效防止过冲。在一维内,不同位置点的定位波动可以被控制在±4nm左右。经过目前的测试,本系统适用于纳米三坐标测量机的驱动与控制任务。
In this paper, the construction of a driving System of Micro-nano CMM is described. Micro-nano CMM is a very complex measuring system, which contains complex mechanical structures, precise signal processing, probe system and driving system, and other subsystems and modules. A novel probe, in this system, based on the principle of DVD pickup, is designed for three-dimensional measurement and positioning. Three piezoelectric linear motors are used as the actuators of the Micro-nano CMM. The mechanical structure of working stage here is made specially in order to aviod Abbe errors. Laser feedback interferometer, a new type of displacement sensor, based on the feedback effect is used as position measuring unit. A new driving and controlling strategy of Micro-nano CMM is proposed, and can be used to achieve the fast and precise driving of large travel with nanometer resolution. The strokes of X, Y, Z are 50 mm × 50 mm × 50 mm. The driving system can achieve unilateral rapid and stable approach to an uncertain distance, and effectively prevent the overshoot. And in one dimension, the positioning fluctuations of different distance can be limited in ±4 nm in analogy mode of the piezoelectric linear motor. According to the test results, the driving and control system is suitable for the Micro-nano CMM.
出处
《新型工业化》
2013年第7期78-85,共8页
The Journal of New Industrialization
基金
Specialized Research Fund for the Doctoral Program of Higher Education(No.20100111110011)
National High Technology Research and Development Program of China(863 Project,Grant No.2008AA042409)
关键词
精密仪器及机械
纳米三坐标测量机
压电直线电机
反馈控制
precision instrument and machinery
micro-nano CMM
piezoelectric linear motor
feedback control
