摘要
针对硅基光波导与单模光纤在光耦合过程中存在耦合效率低,对准难度大的问题,提出了一种新型基于绝缘体上硅(SOI)结构的纳米光栅耦合器。运用有限时域差分法探究了纳米光栅耦合器的结构特性,结合光纤准直器的准直原理,系统分析了纳米光栅耦合器的结构模型。研究了入射光波长、入射角度、光栅占空比等因素对光栅耦合效率的影响,得出了基本纳米光栅耦合器的最佳结构参数;在基本耦合光栅结构的基础上进行了改进,增加了后反射器、增透膜和底层介质膜,并运用Optiwave OptiFDTD 8.0软件优化了各部分结构的设计参数,得到了优化的耦合光栅结构。纳米光栅耦合器的耦合效率提高至59.37%,3dB带宽达到65nm。
A novel nano-grating coupler based on silicon-on-insulator structure is proposed to solve the mismatch issue between the silicon-based optical waveguide and the single-mode fiber.According to the principle of collimation,the structure model and characteristics of the nano-grating coupler are investigated by using the finite-difference time-domain method.Optiwave OptiFDTD 8.0software is used to investigate the factors related to the coupling efficiency,such as the incident wavelength,the incident angle,the grating cycle,the grating duty ratio,the etching depth,the buried-oxide layer thickness and so on.Optimum parameters of the grating structure are obtained.The structure is optimized by adding the rear reflector,the antireflective film and the bottom dielectric reflector on the base of the basic grating.The maximum coupling efficiency of the grating coupler is up to 59.37% with a 3dB bandwidth of 65 nm.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2015年第2期126-130,共5页
High Power Laser and Particle Beams
基金
国家自然科学基金项目(91123036
51105267)
高等学校博士学科点专项科研基金项目(20131402110013
20111402120007)
山西省科技厅科技重大专项项目(20121101004)
山西省高等学校特色重点建设学科项目(晋教材[2012]45号)
山西留学基金项目(2010-030)
山西省青年基金项目(2012021013-1)
博士后基金项目(2012T50248
2011M500542)
关键词
纳米光栅耦合器
有限时域差分法
耦合效率
绝缘体上硅
光纤准直器
nanometer grating coupler
finite-difference time-domain method
coupling efficiency
silicon on insulator
optical fiber collimator
