摘要
近年来,随着微机械加工技术的不断发展,人们对小功率的场致发射阴极的研究日趋活跃,本文介绍了近年来国内外对场致发射阴极的制备,电学特性及应用方面的研究进展情况,并说明该技术的发展必将取得更广泛的应用.
In recent years, with the continaous development of micromachining fabrication, it becomes more and more active that small power field emission cathodes are being studied. In this paper, the fabrication, electrical characteristic and applications of FEC are introduced both in the world and in China. It showcs that the field emission cathodes will find wide applications.
出处
《电子器件》
CAS
1993年第1期39-43,共5页
Chinese Journal of Electron Devices
关键词
真空微电子学
场致发射阴极
制备
Field emissicon cathod, Micromachining fabrication, Vacuum microelectronics.
