摘要
激光清洗是一种新的清洗方法,它利用激光的方向性和高亮度,通过光剥离、光分解等原理清除材料表面的污染物,具有简单方便无二次污染等独特优点。简述了激光清洗的原理及激光清洗表面微粒的方法,介绍了激光清洗在微电子器件清洗、除锈脱漆、文物和城墙清洗等几方面的应用。
Laser cleaning is a novel cleaning method. The contaminants on the surface of materialscan be cleaned with a laser for its directionality and high brightness. The principles for laser cleaningare thought to owe to the optic-ejection, laser-explosion and other reasons. The principles of lasercleaning are presented and some techniques about laser cleaning the surface particle are introduced.Some applications of laser cleaning on micro-electronic devices,rust or paint removed, historic relicsand land marks are summarized.
出处
《清洗世界》
CAS
2004年第5期43-48,60,共7页
Cleaning World
