摘要
介绍了GaN基的3种可见盲紫外光探测器: p-i-N结、肖特基势垒和金属-半导体-金属紫外光 探测器,并对其工作原理、特性和发展现状进行了综述。
Three kinds of visible-blind UV detector including p-i-n junction, Schottky barrier and MSM were reviewed. The operating principles, characteristics and research progress of these devices were introduced.
出处
《量子电子学报》
CAS
CSCD
北大核心
2004年第4期406-410,共5页
Chinese Journal of Quantum Electronics