摘要
本文介绍了一种用于在线检测超精细表面的亚纳米分辨率激光轮廓仪 ,该轮廓仪基于差动干涉原理 ,其测量和参考光束同轴 ,并运用了可消除回光影响的双折射晶体分光光路 ,因此具有杰出的抗振动干扰能力和低噪声性能 ,当振动干扰达 30 0nm时 ,其仪器噪声仍小于 1nm。作在线检测时 ,可摆放于金刚石车床的刀架上测量超精密加工表面微观形貌 ,其垂直分辨率优于 0 2nm ,横向分辨率优于 0 5 μm。
A Laser profilometer with sub-nanometer level reso luti on to measure the superfine surfaces is described in the paper. Its based on the principle of differential interferometer,the measurement and reference ar ms of this profilometer are designed as coaxial,moreover, an optional divided structure wit h birefringence crystal that can avoid the noise caused by reflected light is ap plied to the instrument, so the system has excellent vibration resistance and low noise. Under the circumstance when vibration amplitudes reaches 300nm, the measuring noise is kept less than 1nm. The on-line version of t he profilometer can be put on the kniferest of a diamond lathe to measure the mi c ro-profile of ultra-precision machining surfaces. The vertical resolution and t he lateral resolution are better than 0.2 nm and 0.5μm, respectively.
出处
《中国测试技术》
CAS
2004年第6期13-15,30,共4页
CHINA MEASUREMENT & TESTING TECHNOLOGY
