摘要
利用X射线多晶衍射和计算机模拟的方法对薄膜镀层的物相成分、晶粒度大小、膜厚度、粗糙度、膜密度、吸收系数、折射因子进行测试分析,分析结果表明采用此方法对薄膜进行分析准确度高,速度快.
By using X ray polycrystalline diffraction and method of computer simulation analyzing the phase components of thin film, grain size, thickness, roughness, density, coefficient of absorbing and refractive index were analyzed. The results indicate that this method of the film analyzing is good accuracy and fast.
出处
《福州大学学报（自然科学版）》
CAS
CSCD
2004年第6期773-775,共3页
Journal of Fuzhou University(Natural Science Edition)
关键词
X射线衍射
薄膜
分析
X-ray diffraction
thin film
analyse
