摘要
为适应现代加工技术的需要 ,研制了一种集成非接触式光电传感器 ,它将几何量测量中常见的干涉法测量微观形貌、三角法测量微位移、散射法测量表面粗糙度 3种测量方式结合起来 ,实现同时测量 3种参数的功能。通过运用自适应滤波对数据进行处理 ,其测量精度与单功能传感器相近。
In order to adapt to the development of modern manuf ac ture technology,a noncontact integrated optic-electronic sensor is designed.It combines three common methods:micrometer,roughness-meter and profilometer and can measure micro-displacement,roughness and profile at the same time.It uses an adaptive noise compensation system to eliminate the noise,whose accuracy is similar to each existing single function sensor.
出处
《激光技术》
CAS
CSCD
北大核心
2004年第6期595-597,共3页
Laser Technology
关键词
光电传感器
传感器集成
粗糙度
微位移
微观轮廓
photoelectric sensor
sensor integration
rough ness
micro-displacement
micro-profile
