摘要
采用信号处理的方法对激光干涉测角系统的特性进行线性化处理,需要产生两路正交信号。采用空间互相垂直的两套干涉系统获得信号难免会使系统复杂、调整困难,因此提出了一种插值处理方法,可以利用测量得到的一路信号获得线性输出信号。输出信号的非线性误差较处理前大大减小了,但是无法满足高精度测量的要求。还提出了针对误差产生的原因进行的误差补偿技术。实验结果表明,提出的方法可以实现任意转角的高精度测量,光程差的测量误差小于±0 2μm,对应的转角测量误差为0 63″。
In order to linearize the output signal of angle measurement and laser interference by signal processing technique, two orthogonal signals are generated. It is unavoidable to make the system very complex and hard to adjust if the two signals are generated by two set of interference systems perpendicular to each other. A new method of signal processing by data interpolation in which linear output can be generated by one measured signal is proposed. The non-linear error of the output signal is significantly reduced after processing. But measurement of high precision can not be realized yet. A new method of error compensation by directly reducing the interpolation error is introduced here also. Experiments show that random rotating angle measurement of high precision can be realized. The measurement error of optical length is less than 0.2 μm, equaling to 0.63 double prime of rotating angle.
出处
《光学技术》
EI
CAS
CSCD
北大核心
2005年第1期69-72,76,共5页
Optical Technique
关键词
激光干涉
信号获得
非线性
误差补偿
laser interference
signal acquisition
non-linearity
error compensation
