摘要
微机电系统是面向21世纪的高新技术。文章对微机电系统产生的背景、组成特征、发展现 状及应用前景进行了全面分析。在此基础上,论述了MEMS未来发展的趋势。
Micro-electro-mechanical system (MEMS) is one of the high technologies in the 21st century. The background and characteristics of MEMS are presented. The state-of-the-art of MEMS is described and its application prospect is analyzed. Further more,an overview of the future development of MEMS is made.
出处
《微电子学》
CAS
CSCD
北大核心
2005年第1期71-75,共5页
Microelectronics
关键词
微机电系统
硅微细加工
微传感器
微执行器
Micro-electro-mechanical system
Si micromachining
Micro-sensor
Micro-actuator
