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大型光学非球面超精密磨削的几何模型研究 被引量:21

GEOMETRIC MODEL OF THE ULTRA-PRECISION GRINDING OF LARGE OPTICAL ASPHERIC SURFACES
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摘要 大型光学非球面元件的特殊优越性使其在现代光学系统中是不可替代的 ,实现高效率、更经济的生产以满足对其数量与质量的迫切要求是光学元件的制造面临的一大难题。二轴联动的超精密数控机床是用来加工轴对称非球面光学元件的 ,若在工件主轴上安装可以精确给出旋转角度的码盘 ,并使用金刚石砂轮就可以用来进行非轴对称非球面的超精密磨削加工。在对轴对称与非轴对称两种不同非球面的曲率分析基础上 ,给出了两种曲面加工相应的几何模型。通过计算机仿真验证了该加工方法的简便与可靠性。对二轴联动的超精密数控机床的技术改造可以实现三维加工 ,为提高效率。 Optical components of large sized aspheric surface have gained significant importance and in-dispensability because of their desirable properties. However, efficient and economical manufacturing techniques are still critical problems to meet the demand for precision and quantity. Traditionally 2-axis NC machine was used to manufacture axisymmetric aspheric surface. If a code disc offering accurate readings of the rotation angle is installed on the spindle, non-axisymmetric aspheric surfaces can be processed on it by employing a diamond wheel. The corresponding geometric models for two kind of aspheric surfaces were presented based on curvature analysis. By computer simulation it is verified that the machining approach can be made simple and reliable. According to geometric models the production efficiency can be improved and the equipment input can be reduced so that 3-D machining can be achieved by reforming a 2-axis machine.
出处 《兵工学报》 EI CAS CSCD 北大核心 2004年第6期741-745,共5页 Acta Armamentarii
关键词 超精密磨削加工 二轴联动 数控机床 非球面 金刚石砂轮 曲面加工 工件 光学元件 旋转角度 曲率分析 technology and equipment for machine building, large optical aspheric surface, non-axisymmetric aspheric surface, ultra-precision grinding, geometric model
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参考文献4

  • 1Hiroshi S, Yasuo N, Taizou T, et al. Ultra-precision grinding of grazing incidence X-ray mirrors by on-machine measurement. JSPE, 1995, 61(9):1285-1287
  • 2Tsunemoto K, Mohammad S S Z, Katsuo S A. New grinding method for aspheric ceramic mirrors. Journal of Materials Processing Technology, 1996, 62(4): 387-392
  • 3Suzuki H, Kodera S, Mabkawa S, et al. Study on precision grinding of micro aspherical surface. JSPE, 1998, 64(4): 619-623
  • 4Wills-moren, William J et al. Ductile regime grinding of glass and other brittle materials by the use of ultra-stiff machine tools. SPIE, 1990, 1333:126-135

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