摘要
介绍了微加速度计的基本原理以及国内外常见的各种微加速度计的结构形式,包括压电式、电容式、扭摆式、隧道式等,分析了这些传感器的基本特点,总结微加速度计发展中存在的一些问题,并提出一些解决关键问题的措施,预测微加速度计未来的发展趋势。
The basic principle of microaccelerometers is explained and several kinds of them with different structures are investigated, including piezoelectric type, capacitive type, torsional-cantilever type, tunneling type, etc. The characteristics of those types are introduced. Some focused problems are pointed out. Furthermore, several methods and advices are offered to improve the property of microaccelerometers.
出处
《国防科技大学学报》
EI
CAS
CSCD
北大核心
2004年第6期34-37,共4页
Journal of National University of Defense Technology
基金
国家自然科学基金资助项目(50375154)
