摘要
本文就加工－精度要求高，且口径厚度比为３５：１的薄形零件，设计了多种加工及上下盘方法，并用激光平面干涉仪测试加工过程，从而加工出高质量的零件．
To make a high accuracy thin plate with the ratio between diameter and thickness,35:1,various fabricating and blocking methods are designed and the process of fabricating is checked by a laser flat interferometer.
出处
《光学技术》
CAS
CSCD
1994年第5期11-12,16,共3页
Optical Technique
关键词
密度盘
相对孔径
制造
检测
rough grinding
fine grinding
polishing
cementing
testing
fringe
stress relieving
