摘要
用原子力显微镜(AFM)纳米压痕方法结合扫描力显微镜技术,表征类金刚石(DLC)膜,金块Au,单晶硅Si的纳米硬 度。用能量密度理论解释基于AFM压痕技术测定纳米硬度的机理,给出AFM纳米压痕的能量平衡方程。对DLC膜,金块, 单晶硅进行纳米压痕试验,表明在同样载荷下,不同材料的压痕深度是不相同的。DLC膜具有较高的抗压性能,Si其次,Au 的抗压性能最低。通过曲线拟合技术,定量给出金块的纳米硬度分析模型:H=(2.83/Df)+2.86。
AFM nanoindentation technique combined with scanning force microscope is used to characterize the nano-hardness of diamond-like carbon films, gold sample and silicon. Mechanism of quantitative nano-hardness based on AFM is explained by energy density theory, and the energy balance equation for AFM nanoindentation is raised. According to the results of nanoindentation test on the specimen above, the relationships of indent depth versus normal force, and depth versus nano-hardness, are fitted, i.e., indentation depth at the same load is varied with case material. Among the three materials, DLC film has the highest resistance to compression, and silicon is higher than gold. Through the nonlinear curve fit, data model of quantitative measuring nano-hardness of Au is estimated: H = (2.83/Df) + 2.86.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2005年第3期272-274,278,共4页
Chinese Journal of Scientific Instrument
基金
江苏省教育厅科技计划(03KJD460066)
江苏大学微纳米技术研究中心专项基金
开放基金资助项目
