摘要
介绍了NEMS谐振器的主要特点与性能参数。并且详细讨论了NEMS谐振器的材料、制备工艺以及激励与检测手段。同时根据结构与工作模态,分类介绍了近年来国际上出现的几种典型的NEMS谐振器。最后分析了 NEMS谐振器发展所面临的挑战,并指出NEMS谐振器将具有良好的应用与发展前景。
Main properties and parameters of Nano-Electro-Mechanical-System (NEMS) resonators are introduced. The materials, fabrication technology, excitation and testing methods of NEMS resonators are discussed. Some typical types of NEMS resonators are also classified by structure and operation mode. Finally, the challenges in the development of NEMS resonators are analyzed and the great potential of NEMS resonators in future applications is presented.
出处
《电子器件》
EI
CAS
2005年第1期30-34,共5页
Chinese Journal of Electron Devices
