2[3]Chou B C S,Shic J S,Chen Y M. A Highly Sensitive Pirani Vacuum Guage The 8th International Conference on Solid-state Sensors Actuators,and Enrosensors Ⅸ, Stockholm, Sweden, 1995
3[4]Weng Ping Kuo,Shie J S. Micro - Pirani Vacuum Gauge. American Insitute of Physics, 1994,65(2):492～499
4[5]Nassiopoulos A A,Kaltsas G, Nassiopolou A G.Stabilization of Power Consumption of the Heater of a Micromachined Silicon Gas Sensor. ICECS 2001 ,Valletta, 2001
5[6]Mastrangelo C H, Muller R S. Design and Performance of Constant-temperature Circuits for Microbridge - sensor Application. Transducers' 91, San Francisco, 1991
6[7]Ferreira R P C,Freire R C S,Deep G S,et al. Amauri Oliveira Fluid Temperature Compensation in a Hot Wire Anemometer Using a Single Sensor. The 17th IEEE Instrumentation and Measurement Technology Conference, Baltimore, 2000
7Lou R C. Sensor technologies and microsensor is-sue for mechatronics system [ J ]. IEEE/ASMETransactions on Mechatronics, 1996,1 ( 1 ) : 39 -49.
9Melin T,et al. A Low - pressure encapsulated deepreactive ion etched resonator pressur sensor electri-cally excited and detected using burst technology[J]. J Micromech ,2000,10 :209 -217.
10JianjunLi,Xihong Ma. The Design of Wide InputRange and High - Precision Frequency MeterBased on FPGA [ C ]. 2010 International Confer-ence on E - Product E - Service and E - Entertain-ment (ICEEE) ,Nov 2010:1 -4.
