摘要
利用直流电弧等离子体喷射化学气相沉积法进行不同质量的金刚石厚膜的制备。金刚石膜用倒置荧光显微镜(OM)、高分辨电镜(HRTEM)、电子能量损失谱(EELS)、拉曼谱(Raman)进行表征,同时测量了不同质量金刚石膜的红外透过率和热导率。研究结果表明,黑色组织主要是金刚石膜中的夹杂物,成分主要是非晶碳和杂质氮。对于光学级透明金刚石膜,具有很高的红外透过率和热导率,黑色组织的存在明显降低了金刚石膜的质量,对金刚石膜的红外透过率和热导率的影响非常显著。
Different grades of CVD diamond films were prepared by 100KW DC Arc Plasma Jet system. The films were characterized using optical microscope (OM), high-resolution transmission electron microscopy (HRTEM), EELS (electron energy loss spectroscopy), Raman spectroscopy. The results show that microfeature mainly is inclusions in CVD diamond films, the concentration are amorphous carbon and nitrogen. For transparent optical grade diamond film, it has very high IR transparency and high thermal conductivity. The appearance of microfeature degraded the quality of CVD diamond film, apparently influencing IR transparency and thermal conductivity.
出处
《红外技术》
CSCD
北大核心
2005年第2期175-178,共4页
Infrared Technology
基金
863项目编号:2202AA305508
