摘要
简介薄膜应力的产生原因,根据薄膜应力测定方法研究的现状,对一些主要测定方法的基本原理及各自的特点进行了综述。
The cause of the stress in thin film is introduced simply. And the primary theories and characteristics of some important measurement methods of stress in thin films were summarized according to the current status of the improvement of the methods.
出处
《现代制造工程》
CSCD
2005年第4期127-130,共4页
Modern Manufacturing Engineering
基金
重庆大学机械学院基础研究项目资助
关键词
薄膜
应力
测定
原理
Thin film Stress Measurement Theory
