摘要
采用虚拟相位靶标方法实现光栅投射轮廓测量中三维空间坐标的标定,探讨了X、Y方向和高度Z 方向标定的原理与关键技术,并对虚拟相位靶标进行了试验研究。实验结果表明:采用该方法只需要1个参考面图像序列就可实现X、Y方向坐标标定,简化了现有标定方法中至少需要采集2 个图像序列的繁琐过程,而且标定后X、Y方向误差仅为0.1 mm和0.2 mm,高度Z方向的误差最大不超过0.2mm,标准偏差不超过0.040 mm。
A virtual phase calibrating model plane method for the coordinate calibration in grating projection profilometry is presented. Plane (X-axis and Y-axis) calibration and height (Z-axis) calibration are studied respectively. The virtual phase calibrating model plane is designed to calibrate the plane coordinates. Experiment results show that the proposed calibration procedure using the virtual phase calibrating model plane method is more efficient in that it needs only one series of images of reference plane, whereas the traditional calibration method requires at least two kinds of calibrating model planes and two series of images. And the calibration error of X-axis and Y-axis is only 0.1 mm and 0.2 mm respectively, and the calibration error and standard deviation of height (Z-axis) is not more than 0.20 mm and 0.040 mm respectively.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2005年第5期591-595,共5页
Journal of Optoelectronics·Laser
基金
教育部科学技术研究重点资助项目(99140)
