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An Alternative Method for SU-8 Removal Using PDMS Technique

一种利用PDMS工艺解决SU-8去胶问题的方法(英文)
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摘要 An alternative method for SU-8 removal is proposed.Instead of directly using SU-8 microstructure as the electroplating mold,a polydimethysiloxane (PDMS) replica is employed.The metallic micromold insert obtained through this method can be easily peeled off from the PDMS replica,meanwhile with high resolution and smooth surfaces. 提出了一种解决SU 8 去胶难题的方法.该方法首先将SU- 8 微结构用PDMS进行复制,然后利用复制的PDMS微结构进行下一步的电铸,电铸完成后只要简单地将PDMS揭下即可释放出金属模具.通过该方法制备得到了深宽比达到10的金属模具,而且模具表面光滑,侧壁垂直.
作者 李建华 陈迪 张金娅 刘景全 朱军
机构地区 上海交通大学微纳米科学技术研究院
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第5期899-903,共5页 半导体学报（英文版）
基金 国家高技术研究发展计划资助项目(批准号:200211404150)~~
关键词 SU-8 removal ELECTROPLATING PDMS micromold insert high-aspect-ratio microstructures SU-8去胶 电铸 PDMS 金属模具 高深宽比微结构
分类号 TN405 [电子电信—微电子学与固体电子学]
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参考文献10

  • 1Dellmann L, Roth S, Bcuret C, et al. Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications. Sensors and Actuators A, 1998,70: 42
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Journal of Semiconductors
2005年 第5期

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