摘要
研究超高真空材料的升温脱附谱对于获得超高真空、提高极限真空度和指导真空系统的烘烤除气有重要的意义。作者设计并加工了研究超高真空升温脱附谱的实验设备,并用此设备测量了真空系统结构材料不锈钢、无氧铜和铝合金的升温脱附谱。
The temperature programmed desorption spectra are very important to raising the vacuum limit and guiding how to bake the vacuum systems for degassing. An UHV system is thus developed to explore and test the temperature programmed desorption spectra of commonly used materials, including stainless-steel, oxygen-free copper and Al alloys.
出处
《真空》
CAS
北大核心
2005年第3期35-39,共5页
Vacuum
关键词
:超高真空
升温脱附谱
离子流
峰(值)
ultrahigh vacuum
temperature programmed desorption spectrum
ion current
peak value
