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磁场直拉硅原理的微观解释 被引量:3

Micro-explanation of the Principle of the Magnetic Czochralski Silicon(MCZSi)
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摘要 本文从电磁相互作用基本原理出发,研究锗熔体在垂直磁场中粘度的变化、液态汞在水平磁场中粘度的变化和粘度随磁场强度变化的机理,将研究结果拓展到磁场直拉硅的生产中,根据直拉硅和磁场直拉硅生产过程中,硅熔体中硅原子或原子团的带电状态和运动状态,提出了磁场直拉硅原理的微观解释,外加磁场改变了带电硅粒子(带电的硅原子或原子团)的热对流状态,抑制了熔体中的热起伏,稳定了结晶前沿处熔体的流动状态,为晶体生长提供了稳定的条件。 According to the principle of electromagnetic interaction, the variable viscosity of the melt germanium by the rotational method under the vertical magnetic field and the viscosity of liquid Hg under the horizontal magnetic field were researched. The result was developed to the MCZSi. The motion states of Si particles in the production processes of CZSi and MCZSi were researched and the micro-explanation of the principle of MCZSi was presented. Thermal convection of Si particle was changed by the magnetic field so that the thermal fluctuation was restrained and the steady condition was supplied for the crystal growth.
作者 张雯
出处 《人工晶体学报》 EI CAS CSCD 北大核心 2005年第3期525-530,共6页 Journal of Synthetic Crystals
基金 河北省自然科学基金资助项目(No.503054)
关键词 磁场 锗熔体 液态汞 粘度 硅熔体 微观解释 magnetic field melt Ge liquid Hg viscosity melt Si micro-explanation
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参考文献10

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二级参考文献3

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