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CdTe和CdZnTe室温探测器钝化方法概述 被引量：3

The Summarization of Passivation Techniques on CdTe and CdZnTe Room-tempreture Detectors
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摘要 CdTe和CdZnTe是X射线和γ射线探测器最理想的材料。钝化可以降低CdTe和CdZnTe的表面漏电流,提高其能量分辨率。本文综述了CdTe和CdZnTe的H2O2湿法钝化方法和热氧化、氧离子钝化、氧离子/SiNx钝化等干法钝化方法。 CdTe and CdZnTe have shown great promise as materials to be used for the production of X-ray and γ-ray detectors operating at room temperature. In order to reduce surface leakage current and improve energy resolution, passivation is performed. This article summaries the passivation of CdTe and CdZnTe, including wet processing techniques such as H2O2 passivation and dry processing techniques such as oxygen plasma passivation , thermal oxidation and oxygen plasma /SiNx passivation.
作者 赵晓燕 鲁正雄
机构地区 中国空空导弹研究院
出处 《红外技术》 CSCD 北大核心 2005年第4期324-327,共4页 Infrared Technology
关键词 CDTE CDZNTE 室温探测器 钝化 CdTe CdZnTe room-temperature detector passivation
分类号 TN215 [电子电信—物理电子学]
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参考文献10

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二级参考文献9

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共引文献3

同被引文献51

引证文献3

二级引证文献7

红外技术
2005年 第4期

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