摘要
报道了一种对类金刚石薄膜红外透射率曲线最小二乘法拟合的方法，确定类金刚石薄膜的红外光学常数─—折射率、吸收系数以及薄膜厚度及表面粗糙度。介绍了相应的数学模型，并给出了对类金刚石薄膜样品的实测及拟合结果。
transmittance curve fitting method was used to determine the IR refractive index, absorption coeffecient, thickness and surface roughness of diamond-like films. A mathematical model to calculate the transmittance function of diamond-like films on silicon substrate is introduced. The experimental measurement and curve fitting results are given.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1995年第8期1140-1143,共4页
Acta Optica Sinica
