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化学水浴沉积CdS薄膜晶相结构及性质 被引量:18

Crystal Structure and Properties of Chemical Bath Deposited CdS Thin Films
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摘要 采用CBD法在醋酸镉溶液体系中制备CdS半导体薄膜,研究了溶液组份的浓度对CdS结晶结构的影响.增加乙酸胺的浓度、提高溶液的pH值有利于生成立方晶CdS,反之则易于生成六方晶CdS.无论立方相还是六方相CdS薄膜,电阻率均在104~105Ω·cm范围,结晶均匀细致.用六方晶为主和立方晶为主的CdS制备的CIGS太阳电池最高效率分别达到12.10%和12.17%. Chemical bath deposition(CBD) of CdS semiconductor thin films in solutions of cadmium acetate are carried out. The influence of content concentrations in solutions on crystal structure of CdS thin films is investigated. The increase in ammonium acetate concentration and the pH values of the solutions promote the formation of cubic phase CdS more easily than formation of hexagonal phase CdS. The resistivities of these cubic and hexagonal CdS thin films, whose crystal structure is uniformity and fine,are about 10^4^-10^5Ω·cm. The highest efficiency of CIGS solar cell using hexagonal CdS or cubic CdS thin films is 12. 10% or 12. 17% ,respectively.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第7期1347-1352,共6页 半导体学报(英文版)
基金 国家高技术研究发展计划(批准号:2004AA513021) 江西省自然科学基金(批准号:0120024)资助项目~~
关键词 化学水浴沉积 CDS CIGS太阳电池 晶相结构 CBD CdS thin film CIGS solar cells
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参考文献10

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