摘要
本文主要阐述应用微细力。工技术研究和开发电磁型微电机定子绕组的制备工艺，重点介绍制备定子绕组所涉及到的各种材料及其用途。采用掩模电镀技术解决了平面工艺难以解决的线围绕组。本研究结果为双层十七圈三对六组绕组系统。最小线宽为３μｍ，微电机直径为２ｍｍ，最大工作电流１２０ｍＡ，电阻值在２４－２６Ω之间。输出力矩为１．５μＮｍ，转子转速每分钟可达５００转。
The fabrication process of stator winding of electromagnetic micromotor wasresearched and developed with microprocess.The use and materials to fabricate stator winding are discussed in this pa-per.We have solved fabrication process of stator winding with mask plating tech-nique. The stator winding under study is composed of double layer coils,17turns and 3 pairs. Diameter of the stator winding is 2mm and minimun line widthis 3 μm. Coil operating current is 150mA and resistencwe is 24-26Ω.Output torqueof 1.5μNm and rotating speed of 500 rpm of the rotator been achieved.
出处
《微细加工技术》
1995年第3期44-48,共5页
Microfabrication Technology
关键词
电磁型
微电机
定子绕组
掩摸电镀
electromagnetism micromotor
stator winding
micromecha-nism
mask plating
