摘要
本文论述一种高分辨率的球面微观轮廓仪。仪器由三部分组成：双焦透镜偏振共路干涉系统；五维球面扫描工作台及其驱动系统；共模抑制电子处理系统。可用于各种球形表面（如光学透镜，球面反射镜及滚珠等）的无损精密检测。实测结果表明该仪器的纵向分辨率可达０．１ｎｍ，横向分辨率小于２ｕｍ。
Abstract A spherical profiler of high resolusion is described in this paper. Thisprofiler consists of three parts; a double focus polarization common path interference sys-tem; a five demensions spherical scanning operation table and a common mode rejectionelectronic processing system. It can be test non contactly a variety of spherical(for exam-ple,a variety of lens surface and metallic spherical surface). The profiler has the vertical res-olusion better than 0.1nm and the lateral resolusion better than 2um.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1995年第3期254-259,共6页
Chinese Journal of Scientific Instrument
