摘要
隧穿磁强计是一种基于量子力学中隧道效应原理的新型磁强计,该文给出了两种隧穿磁强计方案,一种是洛伦次力方向和敏感元件平面相互垂直的垂直式方案,另一种是洛伦次力方向和敏感元件平面相互重合的水平式方案,分析了垂直式方案的加工难点。建立了水平式隧穿磁强计的敏感元件——质量弹簧系统的模型,推导了系统刚度和1阶固有频率的计算式,应力仿真图、静力变形仿真图和1阶振型仿真图均符合设计要求,结果证明模型是正确的。
Turmeling magnetometer is a kind of new magnetometer based on tunnel effect in quantum mechanics. This paper offers two projects of tunneling magnetometer. One is vertical project in which Lorentz force is vertical to the level of sensitive element, and the other is horizontal project in which Lorentz force is in the same level of sensitive element. We discussed the difficulties to fabricate the vertical tunneling magnetometer in this paper. The mass-spring system, which is the sensitive element of horizontal tunneling magnetometer, was modeled. Equations of first-order resonance frequency and stiffness of the system were setup. The emulation charts of stress, static force deformation and first-order mode of vibration all meet the demand of design; thus the result shows that the model is correct.
出处
《压电与声光》
CSCD
北大核心
2005年第5期566-568,共3页
Piezoelectrics & Acoustooptics
基金
微米纳米加工技术国家重点实验室基金资助项目
