摘要
以In2(SO4)3为原料,通过sol-gel法制备了立方晶系的In2O3粉体。利用X射线衍射仪、透射电镜对材料的组成、晶粒的大小、结构进行了表征。结果表明,产物为平均粒径30 nm左右的圆球形颗粒。将前驱体分别在不同温度下进行热处理,对其气敏性能研究发现,900℃热处理的元件,在工作温度245℃时,对50×10–6 Cl2表现出较好的灵敏度(1.5×104)和选择性。600℃热处理的元件,在工作温度245℃时,对50×10–6 NO2的灵敏度高达2.5×105。最后,对其气敏机理进行了分析。
In2O3 power was synthesized by sol-gel method with the In2（SO4）3 as the starting materials. The microstructure was characterized through XRD and TEM. The results show In2O3 is spherical with the mean grain size of 30 nm or so and the dispersity of it is even. The study of sensor＇s gas sensing characteristic shows In2O3 has highest sensitivity （1.5×10^4） to 50×10^-6 Cl2 at the optimum working temperature 245℃ when the precursor has been treated at 900℃. In addition, it has higher sensitivity （2.5×10^5） and selectivity to 50×10^-6 NO2 when it has been treated at 600℃ at the working temperature 245℃. Finally, The gas mechanism has been also discussed.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2005年第11期10-12,15,共4页
Electronic Components And Materials
基金
河南省自然科学基金资助项目(0424270073)
