摘要
采用分层蒸镀法,在玻璃基片上依次蒸镀二氨基二苯醚(ODA)和均苯四甲酸二酐(PMDA)两种单体,然后在空气环境中对样品进行不同温度和时间的热亚胺化处理,使二者在交界面上反应生成聚酰亚胺。经加热150℃1 h然后经350℃2 h处理的样品,在脱膜后能制备出直径1.8 cm,厚度为100 nm的聚酰亚胺自支撑薄膜。用FTIR测量了自支撑薄膜的红外光谱,特征吸收峰的分析表明薄膜已基本上完全亚胺化。用原子力显微镜分析了浮法玻璃衬底上聚酰亚胺薄膜的表面形貌,结果表明以ODA作为内层制备的膜层表面更光滑平整。
Ultra-thin freestanding polyimide（Pl） films of 100 nm thickness were formed by sequential evaporation of 4,4＇-diaminodiphenyl ether（ODA） and pyromellitic dianhydride（PMDA） precursor monomers followed by a thermal treatment of 150℃ 1 h and 350℃ 2 h. The chemical structures of the PI films were investigated using FTIR spectroscopy and the degree of imidization was calculated. Results show that the PI film has a fully imidization. The surface morphology of the films, compared with codeposited PI films, was observed using AFM, the surface morphology of the PI films would be better by depositing ODA first.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2005年第10期1528-1532,共5页
High Power Laser and Particle Beams
基金
国家863计划项目资助课题
国家自然科学基金资助课题(10576021)
关键词
分层蒸镀
单体
聚酰亚胺
自支撑膜
表面形貌
Sequential deposition
Monomer
Polyimide
Freestanding film
Surface morphology
