摘要
介绍了蒸气式(湿式)激光清洗,对基底强吸收、基底与液膜共同吸收、液膜强吸收的3种情况给予了分析讨论。给出了实验装置示意图,还介绍了蒸气式激光清洗中的一些理论问题,如峰值温度和瞬态力的估算。最后对干式和湿式激光清洗进行了简单比较。
In the present paper, three cases of “steam laser cleaning”, e. g. , substrate heating only, liquid - film heating only, or both substrate and liquid - film heating were schematically shown and discussed. Semiquantitative understanding of optimization steam laser cleaning, such as estimate of peak temperature and estimate of transient force was summarized. Finally the steam and dry laser cleaning were compared
出处
《清洗世界》
CAS
2005年第9期27-29,34,共4页
Cleaning World
关键词
爆炸蒸发
峰值温度
瞬时力
激光清洗
explosive evaporation
peak temperature
transient force
laser cleaning