摘要
采用波长355nm的紫外偏振激光,通过步进扫描法在聚酰亚胺(BDTA-MMAD)薄膜表面制备了激光诱导周期性表面微结构(LIPSS),采用原子力显微镜(AFM)分析了LIPSS图形质量及几何尺寸,考察了X、Y方向扫描速度和扫描步长等参数对LIPSS制备的影响,发现随着X方向扫描速度和Y方向扫描步长的增大,由于薄膜表面受到激光辐射累积能量降低,LIPSS图形质量明显下降。但是,在提高Y方向扫描步长的同时提高激光辐射能量,仍能在较快速度下制得规则的LIPSS结构。根据实验结果提出了实现LIPSS快速制备的优化条件,并探讨了LIPSS的形成机理。
Laser-induced periodic surface structures （LIPSS） were prepared on polyimide（BDTA-MMAD）films by using a linearly polarized laser irradiation of 355nm, the third harmonic of an Nd：YAG laser, with step scan exposure method. Atomic force microscope （AFM） was applied to observe the pattern quality and analyze the dimensional characteristics of LIPSS.Accordingly, the effects of step scan parameters, such as scan rates and scan paces in X-and Y-direction, on preparation of LIPSS were investigated. The experimental results show that the pattern quality of LIPSS gets worse obviously as the scan rate in X-direction or the scan pace in Y-direction increases because of the decrease of total irradiation energy. However, the regular LIPSS can be rapidly generated even at a big scan pace in Y-directon while laser fluence rises at the same time. On the base of these experiments, the optimized conditions to get regular LIPSS were proposed and the formation mechanism of LIPSS was discussed.
出处
《实验室研究与探索》
CAS
2005年第9期11-14,共4页
Research and Exploration In Laboratory
基金
国家自然科学基金(批准号20004006
60087001)
上海市纳米专项基金资助项目(0352nm071)
关键词
激光诱导周期性表面微结构
原子力显微镜
步进扫描法
laser-induced periodic surface structures （LIPSS）
atomic force microscope（AFM）
step scan method
