摘要
目的:评价大气热氧化、阳极氧化和氮化钛镀膜对铸造纯钛表面膜组成和厚度的影响。方法:制作纯钛试件12个,随机分为对照组、大气热氧化组、阳极氧化组和氮化钛镀膜组进行表面改性。然后进行膜表面和剖面的俄歇电子能谱(AES)分析。结果:对照组、大气热氧化组和阳极氧化组的最表层,O原子含量大于Ti(原子比约为2:1)。达到氧化物/金属界面时对照组氧化膜厚度约为9nm(溅射时间约为18sec),热氧化组约为20nm(溅射时间约为40sec),阳极氧化组约为174nm(溅射时间约为5min48sec)。氮化钛镀膜组最表面O原子的含量很低,约占10%,而N+Ti占58%,Ti占20%,氮化钛膜厚度约为300nm(溅射时间约为10min)。结论:在本实验条件下,未处理组,热氧化组和阳极氧化组表面膜的主要成分为TiO2,表面膜厚度由高到低依次为阳极氧化组>热氧化组>对照组。氮化钛镀膜组表面膜最厚,主要成分为氮化钛。
Objective： To evaluate the influence of air oxidation,anodizing and TiN coating sample on elemental composition and thickness of surface film of cast pure titanium. Methods： 12 pure titanium specimen were prepared and randomly divided into four groups, then surface modification was made to each group separately. The experiment condition was in turn： air oxidation （400℃ ,30min）, anodizing （45 volts, 10min） and TiN coating（ firrring temperature 200℃ , total coating time 62min）. PHI-600 Scanning Auger Electronic microprobe was used to analyze the Auger electronic spectroscopy （AES） of the surface film of each specimen. Results： According to the surface AES survey spectra, O signal was higher than Ti signal （approximately 2： 1） in group of control, oxidation and anodizing ; To TiN coated specimen, there was higher N＋Ti（about 58%） signal besides Ti（about 20%） and O signal（about 10%）. Observing the depth profiles of all specimen, different thickness of surface films were detected： control group 9nm （splashing time 18s＇ ）, oxidation group20nm（splashing time 40s＇ ）, anodizing group174nm（splashing time 5min48s＇ ）, TiN coating group300nm（splashing time nearly 10min）. Conclusions： Under present experimental condition, the oxide film of oxidizing group and anodized group were primarily consisted of TiO2; but TiN coating group, the most exterior surface was covered by TiO2 that was very thin, the dominant composition of the surface film was TiN. The thickness of surface film of each group was in turn： TiN coating group 〉 anodizing group 〉 oxidation group 〉 control group.
出处
《口腔颌面修复学杂志》
2005年第4期259-261,共3页
Chinese Journal of Prosthodontics
基金
国家自然科学基金资助项目(30171022)
关键词
牙科
金属材料
纯钛
表面改性
dental service
metal material
pure titanium
surface modification
